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LITHOGRAPHY

PACIFIC RIM Thin Films provides lithography on 6” substrates (silicon, quartz, or glass). We provide a wide variety of wafer patterning solutions catered to the semiconductor, MEMS, and biotechnology industries. Standard test patterns are available for CMP, Etch, Clean, and Device manufacturing markets. In addition we accept custom wafer patterning projects based upon end-user design with an option to provide mask design and manufacturing. PACIFIC RIM Thin Films can work with customer provided masks or our applications engineers can work with customers to develop a custom patterning solution.

Materials: Silicon, Glass, Quartz
Wafer Diameters: 150 mm
Lithography Tools: Nikon and ASML Steppers
Technology Nodes: 250 nm and larger